Open-Source Differentiable Lithography Imaging Framework

Fuente: arXiv

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Bibliographic Details
Main Authors:	Chen, Guojin, Geng, Hao, Yu, Bei, Pan, David Z.
Format:	Preprint
Published:	2024
Subjects:	Applied Physics Emerging Technologies
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2409.15306