Measuring Chemical Shifts with Energy-Dispersive X-ray Spectroscopy

Fuente: arXiv
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Main Authors: Chen, Yueyun, Jin, Rebekah, Heffes, Yarin, Zutter, Brian, O'Neill, Tristan P., Lodico, Jared J., Regan, B. C., Mecklenburg, Matthew
Format: Preprint
Published: 2024
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author Chen, Yueyun
Jin, Rebekah
Heffes, Yarin
Zutter, Brian
O'Neill, Tristan P.
Lodico, Jared J.
Regan, B. C.
Mecklenburg, Matthew
author_facet Chen, Yueyun
Jin, Rebekah
Heffes, Yarin
Zutter, Brian
O'Neill, Tristan P.
Lodico, Jared J.
Regan, B. C.
Mecklenburg, Matthew
contents Electron microscopy prevalently uses energy-dispersive x-ray spectroscopy (EDS) and electron energy loss spectroscopy (EELS) for elemental analysis. EDS and EELS energy resolutions are commonly between 30-100 eV or 0.01-1 eV, respectively. Large solid angle EDS detector technology has increased collection efficiency to enable precision spectroscopy via averaging of 0.02-0.1 eV. This improved precision gives access to chemical shifts; examples are shown in compounds of Al, Ti, and W. EDS can now detect chemical information in a complementary parameter space (accelerating voltage, thickness, atomic number) to that covered by EELS.
format Preprint
id arxiv_https___arxiv_org_abs_2409_15639
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Measuring Chemical Shifts with Energy-Dispersive X-ray Spectroscopy
Chen, Yueyun
Jin, Rebekah
Heffes, Yarin
Zutter, Brian
O'Neill, Tristan P.
Lodico, Jared J.
Regan, B. C.
Mecklenburg, Matthew
Materials Science
Electron microscopy prevalently uses energy-dispersive x-ray spectroscopy (EDS) and electron energy loss spectroscopy (EELS) for elemental analysis. EDS and EELS energy resolutions are commonly between 30-100 eV or 0.01-1 eV, respectively. Large solid angle EDS detector technology has increased collection efficiency to enable precision spectroscopy via averaging of 0.02-0.1 eV. This improved precision gives access to chemical shifts; examples are shown in compounds of Al, Ti, and W. EDS can now detect chemical information in a complementary parameter space (accelerating voltage, thickness, atomic number) to that covered by EELS.
title Measuring Chemical Shifts with Energy-Dispersive X-ray Spectroscopy
topic Materials Science
url https://arxiv.org/abs/2409.15639