Electric field management in $β$-$Ga_2O_3$ vertical Schottky diodes using high-k bismuth zinc niobium oxide
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arXiv
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| Natura: | Preprint |
| Pubblicazione: |
2024
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| _version_ | 1866916655749136384 |
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| author | Sharma, Pooja Parasubotu, Yeshwanth Lodha, Saurabh |
| author_facet | Sharma, Pooja Parasubotu, Yeshwanth Lodha, Saurabh |
| contents | In this work, we have integrated bismuth zinc niobium oxide (BZN), a high-k dielectric material, in metal-insulator-semiconductor (MIS) and field-plated metal-semiconductor (FP-MS) Schottky barrier diodes on $β$-$Ga_2O_3$. This increases the breakdown voltage ($V_{BR}$) from 300 V to 600 V by redistributing the electric fields, leveraging the high permittivity of BZN (k ~210). Enhancement in Schottky barrier height, by approximately 0.14 eV for MIS and 0.28 eV for FP-MS devices, also contributes to the improved $V_{BR}$. BZN inclusion has minimal impact on specific on-resistance ($R_{on,sp}$). Additionally, the devices display excellent current-voltage characteristics with ideality factors close to unity and an on/off current ratio greater than 1010. This work presents the most significant $V_{BR}$ enhancement reported-to-date for MIS devices on $β$-$Ga_2O_3$ without compromising turn-on voltage and $R_{on,sp}$. A comparison of FP-MS and MIS devices shows that FP-MS outperforms MIS in terms of lower $R_{on,sp}$, higher Schottky barrier height, and improved VBR. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2409_16103 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | Electric field management in $β$-$Ga_2O_3$ vertical Schottky diodes using high-k bismuth zinc niobium oxide Sharma, Pooja Parasubotu, Yeshwanth Lodha, Saurabh Applied Physics Materials Science In this work, we have integrated bismuth zinc niobium oxide (BZN), a high-k dielectric material, in metal-insulator-semiconductor (MIS) and field-plated metal-semiconductor (FP-MS) Schottky barrier diodes on $β$-$Ga_2O_3$. This increases the breakdown voltage ($V_{BR}$) from 300 V to 600 V by redistributing the electric fields, leveraging the high permittivity of BZN (k ~210). Enhancement in Schottky barrier height, by approximately 0.14 eV for MIS and 0.28 eV for FP-MS devices, also contributes to the improved $V_{BR}$. BZN inclusion has minimal impact on specific on-resistance ($R_{on,sp}$). Additionally, the devices display excellent current-voltage characteristics with ideality factors close to unity and an on/off current ratio greater than 1010. This work presents the most significant $V_{BR}$ enhancement reported-to-date for MIS devices on $β$-$Ga_2O_3$ without compromising turn-on voltage and $R_{on,sp}$. A comparison of FP-MS and MIS devices shows that FP-MS outperforms MIS in terms of lower $R_{on,sp}$, higher Schottky barrier height, and improved VBR. |
| title | Electric field management in $β$-$Ga_2O_3$ vertical Schottky diodes using high-k bismuth zinc niobium oxide |
| topic | Applied Physics Materials Science |
| url | https://arxiv.org/abs/2409.16103 |