NiOx/\b{eta}-Ga2O3 Heterojunction Diode Achieving Breakdown Voltage >3 kV with Plasma Etch Field-Termination
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arXiv
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| Main Authors: | Liu, Yizheng, Roy, Saurav, Peterson, Carl, Bhattacharyya, Arkka, Krishnamoorthy, Sriram |
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| Format: | Preprint |
| Published: |
2024
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| Online Access: | |
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