Resolution Enhancement of Scanning Electron Micrographs using Artificial Intelligence

Fuente: arXiv
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Autori principali: Reclik, Tom, Medghalchi, Setareh, Schumacher, Philipp, Wollenweber, Maximilian, Al-Samman, Talal, Korte-Kerzel, Sandra, Kerzel, Ulrich
Natura: Preprint
Pubblicazione: 2024
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author Reclik, Tom
Medghalchi, Setareh
Schumacher, Philipp
Wollenweber, Maximilian
Al-Samman, Talal
Korte-Kerzel, Sandra
Kerzel, Ulrich
author_facet Reclik, Tom
Medghalchi, Setareh
Schumacher, Philipp
Wollenweber, Maximilian
Al-Samman, Talal
Korte-Kerzel, Sandra
Kerzel, Ulrich
contents Scanning Electron Microscopy (SEM) is pivotal in revealing intricate micro- and nanoscale features across various research fields. However, obtaining high-resolution SEM images presents challenges, including prolonged scanning durations and potential sample degradation due to extended electron beam exposure. This paper addresses these challenges by training and applying a deep learning based super-resolution algorithm. We show that the chosen algorithm is capable of increasing the resolution by a factor of 4, thereby reducing the initial imaging time by a factor of 16. We benchmark our method in terms of visual similarity and similarity metrics on two different materials, a dual-phase steel and a case-hardening steel, improving over standard interpolation methods. Additionally, we introduce an experimental pipeline for the study of rare events in scanning electron micrographs, without losing high-resolution information.
format Preprint
id arxiv_https___arxiv_org_abs_2410_03746
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Resolution Enhancement of Scanning Electron Micrographs using Artificial Intelligence
Reclik, Tom
Medghalchi, Setareh
Schumacher, Philipp
Wollenweber, Maximilian
Al-Samman, Talal
Korte-Kerzel, Sandra
Kerzel, Ulrich
Image and Video Processing
Materials Science
Scanning Electron Microscopy (SEM) is pivotal in revealing intricate micro- and nanoscale features across various research fields. However, obtaining high-resolution SEM images presents challenges, including prolonged scanning durations and potential sample degradation due to extended electron beam exposure. This paper addresses these challenges by training and applying a deep learning based super-resolution algorithm. We show that the chosen algorithm is capable of increasing the resolution by a factor of 4, thereby reducing the initial imaging time by a factor of 16. We benchmark our method in terms of visual similarity and similarity metrics on two different materials, a dual-phase steel and a case-hardening steel, improving over standard interpolation methods. Additionally, we introduce an experimental pipeline for the study of rare events in scanning electron micrographs, without losing high-resolution information.
title Resolution Enhancement of Scanning Electron Micrographs using Artificial Intelligence
topic Image and Video Processing
Materials Science
url https://arxiv.org/abs/2410.03746