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Thickness dependence of the mechanical properties of piezoelectric high-$Q_m$ nanomechanical resonators made from aluminium nitride

Fuente: arXiv

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Bibliographic Details
Main Authors:	Ciers, Anastasiia, Jung, Alexander, Ciers, Joachim, Nindito, Laurentius Radit, Pfeifer, Hannes, Dadgar, Armin, Bläsing, Jürgen, Strittmatter, André, Wieczorek, Witlef
Format:	Preprint
Published:	2024
Subjects:	Mesoscale and Nanoscale Physics Materials Science Applied Physics Quantum Physics
Online Access:	Acceder al recurso
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