Thickness-dependent conductivity of nanometric semiconductor thin films

Fuente: arXiv
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Main Author: Zaccone, Alessio
Format: Preprint
Published: 2024
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author Zaccone, Alessio
author_facet Zaccone, Alessio
contents The miniaturization of electronic devices has led to the prominence, in technological applications, of semiconductor thin films that are only a few nanometers thick. In spite of intense research, the thickness-dependent resistivity or conductivity of semiconductor thin films is not understood at a fundamental physical level. We develop a theory based on quantum confinement which yields the dependence of the concentration of intrinsic carriers on the film thickness. The theory predicts that the resistivity $ρ$, in the 1-10 nm thickness range, increases exponentially as $ρ\sim \exp(const/L^{1/2})$ upon decreasing the film thickness $L$. This law is able to reproduce the remarkable increase in resistivity observed experimentally in Si thin films, whereas the effect of surface scattering (Fuchs-Sondheimer theory) alone cannot explain the data when the film thickness is lower than 10 nm.
format Preprint
id arxiv_https___arxiv_org_abs_2410_04116
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Thickness-dependent conductivity of nanometric semiconductor thin films
Zaccone, Alessio
Mesoscale and Nanoscale Physics
Materials Science
Soft Condensed Matter
Statistical Mechanics
Applied Physics
The miniaturization of electronic devices has led to the prominence, in technological applications, of semiconductor thin films that are only a few nanometers thick. In spite of intense research, the thickness-dependent resistivity or conductivity of semiconductor thin films is not understood at a fundamental physical level. We develop a theory based on quantum confinement which yields the dependence of the concentration of intrinsic carriers on the film thickness. The theory predicts that the resistivity $ρ$, in the 1-10 nm thickness range, increases exponentially as $ρ\sim \exp(const/L^{1/2})$ upon decreasing the film thickness $L$. This law is able to reproduce the remarkable increase in resistivity observed experimentally in Si thin films, whereas the effect of surface scattering (Fuchs-Sondheimer theory) alone cannot explain the data when the film thickness is lower than 10 nm.
title Thickness-dependent conductivity of nanometric semiconductor thin films
topic Mesoscale and Nanoscale Physics
Materials Science
Soft Condensed Matter
Statistical Mechanics
Applied Physics
url https://arxiv.org/abs/2410.04116