Fabrication-Aware Inverse Design For Shape Optimization

Fuente: arXiv
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Auteurs principaux: Khan, Shaheer, Hammood, Mustafa, Jaeger, Nicolas A. F., Chrostowski, Lukas
Format: Preprint
Publié: 2024
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author Khan, Shaheer
Hammood, Mustafa
Jaeger, Nicolas A. F.
Chrostowski, Lukas
author_facet Khan, Shaheer
Hammood, Mustafa
Jaeger, Nicolas A. F.
Chrostowski, Lukas
contents Inverse design (ID) is a computational method that systematically explores a design space to find optimal device geometries based on specific performance criteria. In silicon photonics, ID often leads to devices with design features that degrade significantly due to the fabrication process, limiting the applicability of these devices in scalable silicon photonic fabrication. We demonstrate a solution to this performance degradation through fabrication-aware inverse design (FAID), integrating lithography models for deep-ultraviolet (DUV) lithography and electron beam lithography (EBL) into the shape optimization approach of ID. A Y-branch and an SWG-to-strip converter were generated and fabricated with this new approach. Simulated and measured results verify that the FAID yields devices with up to 0.6 dB lower insertion loss per device. The modified workflow enables designers to use ID to generate devices that adjust for process bias predicted by lithography models.
format Preprint
id arxiv_https___arxiv_org_abs_2410_07353
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Fabrication-Aware Inverse Design For Shape Optimization
Khan, Shaheer
Hammood, Mustafa
Jaeger, Nicolas A. F.
Chrostowski, Lukas
Systems and Control
Inverse design (ID) is a computational method that systematically explores a design space to find optimal device geometries based on specific performance criteria. In silicon photonics, ID often leads to devices with design features that degrade significantly due to the fabrication process, limiting the applicability of these devices in scalable silicon photonic fabrication. We demonstrate a solution to this performance degradation through fabrication-aware inverse design (FAID), integrating lithography models for deep-ultraviolet (DUV) lithography and electron beam lithography (EBL) into the shape optimization approach of ID. A Y-branch and an SWG-to-strip converter were generated and fabricated with this new approach. Simulated and measured results verify that the FAID yields devices with up to 0.6 dB lower insertion loss per device. The modified workflow enables designers to use ID to generate devices that adjust for process bias predicted by lithography models.
title Fabrication-Aware Inverse Design For Shape Optimization
topic Systems and Control
url https://arxiv.org/abs/2410.07353