Surface Structuring of Patterned 4H-SiC Surfaces Using a SiC/Si/SiC Sandwich Approach

Fuente: arXiv

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Bibliographic Details
Main Authors:	Jousseaume, Yann, Kumar, Piyush, Bathen, Marianne Etzelmüller, Cauwet, François, Grossner, Ulrike, Ferro, Gabriel
Format:	Preprint
Published:	2024
Subjects:	Materials Science Applied Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2410.07680