Surface Structuring of Patterned 4H-SiC Surfaces Using a SiC/Si/SiC Sandwich Approach
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arXiv
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| Autores principales: | , , , , , |
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| Formato: | Preprint |
| Publicado: |
2024
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| _version_ | 1866929535514050560 |
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| author | Jousseaume, Yann Kumar, Piyush Bathen, Marianne Etzelmüller Cauwet, François Grossner, Ulrike Ferro, Gabriel |
| author_facet | Jousseaume, Yann Kumar, Piyush Bathen, Marianne Etzelmüller Cauwet, François Grossner, Ulrike Ferro, Gabriel |
| contents | Mesa- and trench-patterned surfaces of 4H-SiC(0001) 4{\textdegree}off wafers were structured in macrosteps using Si melting in a SiC-Si-SiC sandwich configuration. Si spreading difficulties were observed in the case of trench-patterned samples while the attempts on mesa-patterned ones were more successful. In the latter case, parallel macrosteps were formed on both the dry-etched and unetched areas though these macrosteps rarely cross the patterns edges. The proposed mechanism involved preferential etching at Si-C bilayer step edges and fast lateral propagation along the [1120] direction. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2410_07680 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | Surface Structuring of Patterned 4H-SiC Surfaces Using a SiC/Si/SiC Sandwich Approach Jousseaume, Yann Kumar, Piyush Bathen, Marianne Etzelmüller Cauwet, François Grossner, Ulrike Ferro, Gabriel Materials Science Applied Physics Mesa- and trench-patterned surfaces of 4H-SiC(0001) 4{\textdegree}off wafers were structured in macrosteps using Si melting in a SiC-Si-SiC sandwich configuration. Si spreading difficulties were observed in the case of trench-patterned samples while the attempts on mesa-patterned ones were more successful. In the latter case, parallel macrosteps were formed on both the dry-etched and unetched areas though these macrosteps rarely cross the patterns edges. The proposed mechanism involved preferential etching at Si-C bilayer step edges and fast lateral propagation along the [1120] direction. |
| title | Surface Structuring of Patterned 4H-SiC Surfaces Using a SiC/Si/SiC Sandwich Approach |
| topic | Materials Science Applied Physics |
| url | https://arxiv.org/abs/2410.07680 |