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Surface Structuring of Patterned 4H-SiC Surfaces Using a SiC/Si/SiC Sandwich Approach

Fuente: arXiv

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Dettagli Bibliografici
Autori principali:	Jousseaume, Yann, Kumar, Piyush, Bathen, Marianne Etzelmüller, Cauwet, François, Grossner, Ulrike, Ferro, Gabriel
Natura:	Preprint
Pubblicazione:	2024
Soggetti:	Materials Science Applied Physics
Accesso online:	Acceder al recurso
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