A Novel Energy-Efficient Salicide-Enhanced Tunnel Device Technology Based on 300mm Foundry Platform Towards AIoT Applications

Fuente: arXiv
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Main Authors: Wang, Kaifeng, Huang, Qianqian, Wu, Yongqin, Ren, Ye, Wei, Renjie, Wang, Zhixuan, Yang, Libo, Zhang, Fangxing, Geng, Kexing, Li, Yiqing, Yang, Mengxuan, Luo, Jin, Liu, Ying, Zheng, Kai, Kang, Jin, Ye, Le, Zhang, Lining, Bu, Weihai, Huang, Ru
Format: Preprint
Published: 2024
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author Wang, Kaifeng
Huang, Qianqian
Wu, Yongqin
Ren, Ye
Wei, Renjie
Wang, Zhixuan
Yang, Libo
Zhang, Fangxing
Geng, Kexing
Li, Yiqing
Yang, Mengxuan
Luo, Jin
Liu, Ying
Zheng, Kai
Kang, Jin
Ye, Le
Zhang, Lining
Bu, Weihai
Huang, Ru
author_facet Wang, Kaifeng
Huang, Qianqian
Wu, Yongqin
Ren, Ye
Wei, Renjie
Wang, Zhixuan
Yang, Libo
Zhang, Fangxing
Geng, Kexing
Li, Yiqing
Yang, Mengxuan
Luo, Jin
Liu, Ying
Zheng, Kai
Kang, Jin
Ye, Le
Zhang, Lining
Bu, Weihai
Huang, Ru
contents This work demonstrates a novel energy-efficient tunnel FET (TFET)-CMOS hybrid foundry platform for ultralow-power AIoT applications. By utilizing the proposed monolithic integration process, the novel complementary n and p-type Si TFET technology with dopant segregated source junction and self-aligned drain underlap design is successfully integrated into a 300mm CMOS baseline process without CMOS performance penalty and any new materials, experimentally demonstrating the large Ion and record high Ion/Ioff ratio of 10^7 among TFETs by industry-manufacturers. The device performance and variability are also co-optimized for high-volume production. Further circuit-level implementations are presented based on the calibrated compact model. The proposed TFET-CMOS hybrid logic and SRAM topologies show significant energy efficiency improvement with comparable operation speed compared with standard CMOS circuits, indicating its great potential for power-constraint AIoT applications.
format Preprint
id arxiv_https___arxiv_org_abs_2410_12390
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle A Novel Energy-Efficient Salicide-Enhanced Tunnel Device Technology Based on 300mm Foundry Platform Towards AIoT Applications
Wang, Kaifeng
Huang, Qianqian
Wu, Yongqin
Ren, Ye
Wei, Renjie
Wang, Zhixuan
Yang, Libo
Zhang, Fangxing
Geng, Kexing
Li, Yiqing
Yang, Mengxuan
Luo, Jin
Liu, Ying
Zheng, Kai
Kang, Jin
Ye, Le
Zhang, Lining
Bu, Weihai
Huang, Ru
Mesoscale and Nanoscale Physics
This work demonstrates a novel energy-efficient tunnel FET (TFET)-CMOS hybrid foundry platform for ultralow-power AIoT applications. By utilizing the proposed monolithic integration process, the novel complementary n and p-type Si TFET technology with dopant segregated source junction and self-aligned drain underlap design is successfully integrated into a 300mm CMOS baseline process without CMOS performance penalty and any new materials, experimentally demonstrating the large Ion and record high Ion/Ioff ratio of 10^7 among TFETs by industry-manufacturers. The device performance and variability are also co-optimized for high-volume production. Further circuit-level implementations are presented based on the calibrated compact model. The proposed TFET-CMOS hybrid logic and SRAM topologies show significant energy efficiency improvement with comparable operation speed compared with standard CMOS circuits, indicating its great potential for power-constraint AIoT applications.
title A Novel Energy-Efficient Salicide-Enhanced Tunnel Device Technology Based on 300mm Foundry Platform Towards AIoT Applications
topic Mesoscale and Nanoscale Physics
url https://arxiv.org/abs/2410.12390