Contact-interference Hybrid lithography: Toward Scalable Fabrication of cross-scale periodic micro structure and demonstration on infrared micro polarizer array

Fuente: arXiv

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Bibliographic Details
Main Authors:	Lu, Tianshi, Deng, Fuyuan, Wei, Yufeng, Zeng, Zhipeng, Li, Xinghui
Format:	Preprint
Published:	2024
Subjects:	Optics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2410.12573