Polygon-based unified Fourier-modal approach for diffractive optics simulations
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arXiv
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| Hauptverfasser: | , , , , , , |
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| Format: | Preprint |
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2024
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| _version_ | 1866918149324013568 |
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| author | Nikolaev, K. V. Soltwisch, V. Botchev, M. A. Herrero, A. Fernández Hönicke, P. Scholze, F. Yakunin, S. N. |
| author_facet | Nikolaev, K. V. Soltwisch, V. Botchev, M. A. Herrero, A. Fernández Hönicke, P. Scholze, F. Yakunin, S. N. |
| contents | In this article, we derive a theoretical formalism that unifies the rigorous coupled wave analysis and the dynamical diffraction theory. Based on this formalism, we design a computational approach for the diffraction calculation for the nanoscale lamellar gratings with an arbitrary line profile shape. In this approach, the gratings line profile is approximated as a polygon. This proves to be convenient since such an approach does not rely on the geometry model of the grating. We test the new approach against other computational theories and a synchrotron scattering experiment. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2410_14217 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | Polygon-based unified Fourier-modal approach for diffractive optics simulations Nikolaev, K. V. Soltwisch, V. Botchev, M. A. Herrero, A. Fernández Hönicke, P. Scholze, F. Yakunin, S. N. Computational Physics Optics In this article, we derive a theoretical formalism that unifies the rigorous coupled wave analysis and the dynamical diffraction theory. Based on this formalism, we design a computational approach for the diffraction calculation for the nanoscale lamellar gratings with an arbitrary line profile shape. In this approach, the gratings line profile is approximated as a polygon. This proves to be convenient since such an approach does not rely on the geometry model of the grating. We test the new approach against other computational theories and a synchrotron scattering experiment. |
| title | Polygon-based unified Fourier-modal approach for diffractive optics simulations |
| topic | Computational Physics Optics |
| url | https://arxiv.org/abs/2410.14217 |