12-spin-qubit arrays fabricated on a 300 mm semiconductor manufacturing line
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arXiv
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| Auteurs principaux: | , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , |
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| Format: | Preprint |
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2024
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| _version_ | 1866908456373452800 |
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| author | George, Hubert C. Mądzik, Mateusz T. Henry, Eric M. Wagner, Andrew J. Islam, Mohammad M. Borjans, Felix Connors, Elliot J. Corrigan, J. Curry, Matthew Harper, Michael K. Keith, Daniel Lampert, Lester Luthi, Florian Mohiyaddin, Fahd A. Murcia, Sandra Nair, Rohit Nahm, Rambert Nethwewala, Aditi Neyens, Samuel Patra, Bishnu Raharjo, Roy D. Rogan, Carly Savytskyy, Rostyslav Watson, Thomas F. Ziegler, Josh Zietz, Otto K. Pellerano, Stefano Pillarisetty, Ravi Bishop, Nathaniel C. Bojarski, Stephanie A. Roberts, Jeanette Clarke, James S. |
| author_facet | George, Hubert C. Mądzik, Mateusz T. Henry, Eric M. Wagner, Andrew J. Islam, Mohammad M. Borjans, Felix Connors, Elliot J. Corrigan, J. Curry, Matthew Harper, Michael K. Keith, Daniel Lampert, Lester Luthi, Florian Mohiyaddin, Fahd A. Murcia, Sandra Nair, Rohit Nahm, Rambert Nethwewala, Aditi Neyens, Samuel Patra, Bishnu Raharjo, Roy D. Rogan, Carly Savytskyy, Rostyslav Watson, Thomas F. Ziegler, Josh Zietz, Otto K. Pellerano, Stefano Pillarisetty, Ravi Bishop, Nathaniel C. Bojarski, Stephanie A. Roberts, Jeanette Clarke, James S. |
| contents | Intels efforts to build a practical quantum computer are focused on developing a scalable spin-qubit platform leveraging industrial high-volume semiconductor manufacturing expertise and 300 mm fabrication infrastructure. Here, we provide an overview of the design, fabrication, and demonstration of a new customized quantum test chip, which contains 12-quantum-dot spin-qubit linear arrays, code named Tunnel Falls. These devices are fabricated using immersion and extreme ultraviolet lithography (EUV), along with other standard high-volume manufacturing (HVM) processes, as well as production-level process control. We present key device features and fabrication details, as well as qubit characterization results confirming device functionality. These results corroborate our fabrication methods and are a crucial step towards scaling of extensible 2D qubit array schemes. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2410_16583 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | 12-spin-qubit arrays fabricated on a 300 mm semiconductor manufacturing line George, Hubert C. Mądzik, Mateusz T. Henry, Eric M. Wagner, Andrew J. Islam, Mohammad M. Borjans, Felix Connors, Elliot J. Corrigan, J. Curry, Matthew Harper, Michael K. Keith, Daniel Lampert, Lester Luthi, Florian Mohiyaddin, Fahd A. Murcia, Sandra Nair, Rohit Nahm, Rambert Nethwewala, Aditi Neyens, Samuel Patra, Bishnu Raharjo, Roy D. Rogan, Carly Savytskyy, Rostyslav Watson, Thomas F. Ziegler, Josh Zietz, Otto K. Pellerano, Stefano Pillarisetty, Ravi Bishop, Nathaniel C. Bojarski, Stephanie A. Roberts, Jeanette Clarke, James S. Mesoscale and Nanoscale Physics Quantum Physics Intels efforts to build a practical quantum computer are focused on developing a scalable spin-qubit platform leveraging industrial high-volume semiconductor manufacturing expertise and 300 mm fabrication infrastructure. Here, we provide an overview of the design, fabrication, and demonstration of a new customized quantum test chip, which contains 12-quantum-dot spin-qubit linear arrays, code named Tunnel Falls. These devices are fabricated using immersion and extreme ultraviolet lithography (EUV), along with other standard high-volume manufacturing (HVM) processes, as well as production-level process control. We present key device features and fabrication details, as well as qubit characterization results confirming device functionality. These results corroborate our fabrication methods and are a crucial step towards scaling of extensible 2D qubit array schemes. |
| title | 12-spin-qubit arrays fabricated on a 300 mm semiconductor manufacturing line |
| topic | Mesoscale and Nanoscale Physics Quantum Physics |
| url | https://arxiv.org/abs/2410.16583 |