Direct measurement of 2DEG states in shallow Si:Sb $δ$-layers

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Main Authors: Strand, Frode S., Cooil, Simon P., Campbell, Quinn T., Flounders, John J., Røst, Håkon I., Åsland, Anna Cecilie, Skarpeid, Alv Johan, Stalsberg, Marte P., Hu, Jinbang, Bakkelund, Johannes, Bjelland, Victoria, Preobrajenski, Alexei B., Li, Zheshen, Bianchi, Marco, Miwa, Jill A., Wells, Justin W.
Format: Preprint
Published: 2024
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author Strand, Frode S.
Cooil, Simon P.
Campbell, Quinn T.
Flounders, John J.
Røst, Håkon I.
Åsland, Anna Cecilie
Skarpeid, Alv Johan
Stalsberg, Marte P.
Hu, Jinbang
Bakkelund, Johannes
Bjelland, Victoria
Preobrajenski, Alexei B.
Li, Zheshen
Bianchi, Marco
Miwa, Jill A.
Wells, Justin W.
author_facet Strand, Frode S.
Cooil, Simon P.
Campbell, Quinn T.
Flounders, John J.
Røst, Håkon I.
Åsland, Anna Cecilie
Skarpeid, Alv Johan
Stalsberg, Marte P.
Hu, Jinbang
Bakkelund, Johannes
Bjelland, Victoria
Preobrajenski, Alexei B.
Li, Zheshen
Bianchi, Marco
Miwa, Jill A.
Wells, Justin W.
contents We investigate the electronic structure of high-density layers of Sb dopants in a silicon host, so-called Si:Sb $δ$-layers. We show that, in spite of the known challenges in producing highly confined Sb $δ$-layers, sufficient confinement is created such that the lowest conduction band states ($Γ$ states, studied in depth in other silicon $δ$-layers), become occupied and can be observed using angle-resolved photoemission spectroscopy. The electronic structure of the Si:Sb $δ$-layers closely resembles that of Si:P systems, where the observed conduction band is near-parabolic and slightly anisotropic in the $\mathbf{k}_\parallel$ plane. The observed $Γ$ state extends ~ 1 nm in the out-of-plane direction, which is slightly wider than the 1/3 monolayer thick dopant distribution. This is caused by a small segregation of the dopant layer, which is nevertheless minimal when comparing with earlier published attempts. Our results serve to demonstrate that Sb is still a feasible dopant alternative for use in the semiconductor $δ$-layer platform, providing similar electronic functionality to Si:P systems. Additionally, it has the advantages of being less expensive, more controllable, safer to handle, and more compatible with industrial patterning techniques. Si:Sb is therefore a viable platform for emerging quantum device applications.
format Preprint
id arxiv_https___arxiv_org_abs_2410_17387
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Direct measurement of 2DEG states in shallow Si:Sb $δ$-layers
Strand, Frode S.
Cooil, Simon P.
Campbell, Quinn T.
Flounders, John J.
Røst, Håkon I.
Åsland, Anna Cecilie
Skarpeid, Alv Johan
Stalsberg, Marte P.
Hu, Jinbang
Bakkelund, Johannes
Bjelland, Victoria
Preobrajenski, Alexei B.
Li, Zheshen
Bianchi, Marco
Miwa, Jill A.
Wells, Justin W.
Materials Science
We investigate the electronic structure of high-density layers of Sb dopants in a silicon host, so-called Si:Sb $δ$-layers. We show that, in spite of the known challenges in producing highly confined Sb $δ$-layers, sufficient confinement is created such that the lowest conduction band states ($Γ$ states, studied in depth in other silicon $δ$-layers), become occupied and can be observed using angle-resolved photoemission spectroscopy. The electronic structure of the Si:Sb $δ$-layers closely resembles that of Si:P systems, where the observed conduction band is near-parabolic and slightly anisotropic in the $\mathbf{k}_\parallel$ plane. The observed $Γ$ state extends ~ 1 nm in the out-of-plane direction, which is slightly wider than the 1/3 monolayer thick dopant distribution. This is caused by a small segregation of the dopant layer, which is nevertheless minimal when comparing with earlier published attempts. Our results serve to demonstrate that Sb is still a feasible dopant alternative for use in the semiconductor $δ$-layer platform, providing similar electronic functionality to Si:P systems. Additionally, it has the advantages of being less expensive, more controllable, safer to handle, and more compatible with industrial patterning techniques. Si:Sb is therefore a viable platform for emerging quantum device applications.
title Direct measurement of 2DEG states in shallow Si:Sb $δ$-layers
topic Materials Science
url https://arxiv.org/abs/2410.17387