Piezoelectrically actuated high-speed spatial light modulator for visible to near-infrared wavelengths
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arXiv
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| Main Authors: | , , , , , , , , , , |
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| Format: | Preprint |
| Published: |
2024
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| _version_ | 1866914988214452224 |
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| author | Vanackere, Tom Hermans, Artur Christen, Ian Panuski, Christopher Dong, Mark Zimmermann, Matthew Raniwala, Hamza Leenheer, Andrew J. Eichenfield, Matt Gilbert, Gerald Englund, Dirk |
| author_facet | Vanackere, Tom Hermans, Artur Christen, Ian Panuski, Christopher Dong, Mark Zimmermann, Matthew Raniwala, Hamza Leenheer, Andrew J. Eichenfield, Matt Gilbert, Gerald Englund, Dirk |
| contents | Advancements in light modulator technology have been driving discoveries and progress across various fields. The problem of large-scale coherent optical control of atomic quantum systems-including cold atoms, ions, and solid-state color centers-presents among the most stringent requirements. This motivates a new generation of high-speed large-scale modulator technology with the following requirements: (R1) operation at a design wavelength of choice in the visible (VIS) to near-infrared (NIR) spectrum, (R2) a scalable technology with a high channel density (> 100mm-2 ), (R3) a high modulation speed (> 100MHz), and (R4) a high extinction ratio (> 20 dB). To fulfill these requirements, we introduce a modulator technology based on piezoelectrically actuated silicon nitride resonant waveguide gratings fabricated on 200mm diameter silicon wafers with CMOS compatible processes. We present a proof-of-concept device with 4 x 4 individually addressable 50 {mu}m x 50 {mu}m pixels or channels, each containing a resonant waveguide grating with a ~ 780 nm design wavelength, supporting > 100MHz modulation speeds, and a spectral response with > 20 dB extinction. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2410_19058 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | Piezoelectrically actuated high-speed spatial light modulator for visible to near-infrared wavelengths Vanackere, Tom Hermans, Artur Christen, Ian Panuski, Christopher Dong, Mark Zimmermann, Matthew Raniwala, Hamza Leenheer, Andrew J. Eichenfield, Matt Gilbert, Gerald Englund, Dirk Optics Applied Physics Advancements in light modulator technology have been driving discoveries and progress across various fields. The problem of large-scale coherent optical control of atomic quantum systems-including cold atoms, ions, and solid-state color centers-presents among the most stringent requirements. This motivates a new generation of high-speed large-scale modulator technology with the following requirements: (R1) operation at a design wavelength of choice in the visible (VIS) to near-infrared (NIR) spectrum, (R2) a scalable technology with a high channel density (> 100mm-2 ), (R3) a high modulation speed (> 100MHz), and (R4) a high extinction ratio (> 20 dB). To fulfill these requirements, we introduce a modulator technology based on piezoelectrically actuated silicon nitride resonant waveguide gratings fabricated on 200mm diameter silicon wafers with CMOS compatible processes. We present a proof-of-concept device with 4 x 4 individually addressable 50 {mu}m x 50 {mu}m pixels or channels, each containing a resonant waveguide grating with a ~ 780 nm design wavelength, supporting > 100MHz modulation speeds, and a spectral response with > 20 dB extinction. |
| title | Piezoelectrically actuated high-speed spatial light modulator for visible to near-infrared wavelengths |
| topic | Optics Applied Physics |
| url | https://arxiv.org/abs/2410.19058 |