Long-term stability and oxidation of ferroelectric AlScN devices: An operando HAXPES study

Fuente: arXiv
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Bibliographic Details
Main Authors: Rehm, Oliver, Baumgarten, Lutz, Guido, Roberto, Düring, Pia Maria, Gloskovskii, Andrei, Schlueter, Christoph, Mikolajick, Thomas, Schroeder, Uwe, Müller, Martina
Format: Preprint
Published: 2024
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