Long-term stability and oxidation of ferroelectric AlScN devices: An operando HAXPES study
Fuente:
arXiv
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| Autores principales: | Rehm, Oliver, Baumgarten, Lutz, Guido, Roberto, Düring, Pia Maria, Gloskovskii, Andrei, Schlueter, Christoph, Mikolajick, Thomas, Schroeder, Uwe, Müller, Martina |
|---|---|
| Formato: | Preprint |
| Publicado: |
2024
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| Materias: | |
| Acceso en línea: | |
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