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Phase transformation and water adsorption behavior of ALD deposited and annealed Ru and RuO2 films

Fuente: arXiv

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Detalles Bibliográficos
Autores principales:	Nalawade, S. S., Kim, R. S., Mahl, J., Cherono, S., Chris-Okoro, I., Craciun, V., Yan, J., Crumlin, E., Kumar, D., Aravamudhan, S.
Formato:	Preprint
Publicado:	2024
Materias:	Materials Science
Acceso en línea:	Acceder al recurso
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

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