Redundant Cross-Correlation for Drift Correction in SEM Nanoparticle Imaging

Fuente: arXiv
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Main Authors: Montenegro, Iago Bischoff, Prikoszovich, Konrad, Lee, Subin, Quiring, Kilian, Zimmerman, Jonathan, Kirchlechner, Christoph
Format: Preprint
Published: 2024
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author Montenegro, Iago Bischoff
Prikoszovich, Konrad
Lee, Subin
Quiring, Kilian
Zimmerman, Jonathan
Kirchlechner, Christoph
author_facet Montenegro, Iago Bischoff
Prikoszovich, Konrad
Lee, Subin
Quiring, Kilian
Zimmerman, Jonathan
Kirchlechner, Christoph
contents Scanning Electron Microscopy (SEM) is a widely used tool for nanoparticle characterization, but long-term directional drift can compromise image quality. We present a novel algorithm for post-imaging drift correction in SEM nanoparticle imaging. Our approach combines multiple rapidly acquired, noisy images to produce a single high-quality overlay through redundant cross-correlation, preventing drift-induced distortions. The preservation of critical geometrical properties and accurate imaging of surface features were verified using Atomic Force Microscopy. On platinum nanoparticles with diameters of 300 to 1000 nm, significant improvements in the mean-based signal-to-noise ratio (SNR) were achieved, increasing from 4.4 dB in single images to 11.3 dB when overlaying five images. This method offers a valuable tool for enhancing SEM image quality in nanoparticle research and metrology, particularly in settings without specialized hardware-based drift correction.
format Preprint
id arxiv_https___arxiv_org_abs_2410_23390
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Redundant Cross-Correlation for Drift Correction in SEM Nanoparticle Imaging
Montenegro, Iago Bischoff
Prikoszovich, Konrad
Lee, Subin
Quiring, Kilian
Zimmerman, Jonathan
Kirchlechner, Christoph
Materials Science
Instrumentation and Detectors
Scanning Electron Microscopy (SEM) is a widely used tool for nanoparticle characterization, but long-term directional drift can compromise image quality. We present a novel algorithm for post-imaging drift correction in SEM nanoparticle imaging. Our approach combines multiple rapidly acquired, noisy images to produce a single high-quality overlay through redundant cross-correlation, preventing drift-induced distortions. The preservation of critical geometrical properties and accurate imaging of surface features were verified using Atomic Force Microscopy. On platinum nanoparticles with diameters of 300 to 1000 nm, significant improvements in the mean-based signal-to-noise ratio (SNR) were achieved, increasing from 4.4 dB in single images to 11.3 dB when overlaying five images. This method offers a valuable tool for enhancing SEM image quality in nanoparticle research and metrology, particularly in settings without specialized hardware-based drift correction.
title Redundant Cross-Correlation for Drift Correction in SEM Nanoparticle Imaging
topic Materials Science
Instrumentation and Detectors
url https://arxiv.org/abs/2410.23390