Bayesian state estimation unlocks real-time control in thin film synthesis
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arXiv
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| Main Authors: | Harris, Sumner B., Fajardo, Ruth, Puretzky, Alexander A., Xiao, Kai, Bao, Feng, Vasudevan, Rama K. |
|---|---|
| Format: | Preprint |
| Published: |
2024
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| Subjects: | |
| Online Access: | |
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