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Hybrid approach to reconstruct nanoscale grating dimensions using scattering and fluorescence with soft X-rays

Fuente: arXiv

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Bibliographic Details
Main Authors:	Lohr, Leonhard M., Ciesielski, Richard, Truong, Vinh-Binh, Soltwisch, Victor
Format:	Preprint
Published:	2024
Subjects:	Optics
Online Access:	Acceder al recurso
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