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Fabrication of Ultra-Low-Loss, Dispersion-Engineered Silicon Nitride Photonic Integrated Circuits via Silicon Hardmask Etching

Fuente: arXiv

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Bibliographic Details
Main Authors:	Liu, Shuai, Zhang, Yuheng, Hariri, Abdulkarim, Al-Hallak, Abdur-Raheem, Zhang, Zheshen
Format:	Preprint
Published:	2024
Subjects:	Optics Applied Physics
Online Access:	Acceder al recurso
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