Electron dynamics and particle transport in capacitively coupled Ar/O2 discharges driven by sawtooth up voltage waveforms

Fuente: arXiv
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Bibliographic Details
Main Authors: Dong, Wan, Gao, Zhuo-Yao, Wang, Li, Zhang, Ming-Jian, Tian, Chong-Biao, Liu, Yong-Xin, Song, Yuan-Hong, Schulze, Julian
Format: Preprint
Published: 2024
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