Electron dynamics and particle transport in capacitively coupled Ar/O2 discharges driven by sawtooth up voltage waveforms
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arXiv
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| Main Authors: | Dong, Wan, Gao, Zhuo-Yao, Wang, Li, Zhang, Ming-Jian, Tian, Chong-Biao, Liu, Yong-Xin, Song, Yuan-Hong, Schulze, Julian |
|---|---|
| Format: | Preprint |
| Published: |
2024
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| Subjects: | |
| Online Access: | |
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