The influence of geometry and specific electronic and nuclear energy deposition on ion-stimulated desorption from thin self-supporting membranes

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Hauptverfasser: Holeňák, Radek, Malatinová, Michaela, Ntemou, Eleni, Tran, Tuan T., Primetzhofer, Daniel
Format: Preprint
Veröffentlicht: 2024
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author Holeňák, Radek
Malatinová, Michaela
Ntemou, Eleni
Tran, Tuan T.
Primetzhofer, Daniel
author_facet Holeňák, Radek
Malatinová, Michaela
Ntemou, Eleni
Tran, Tuan T.
Primetzhofer, Daniel
contents We investigate the dependence of the yield of positive secondary ions created upon impact of primary He, B and Ne ions on geometry and electronic and nuclear energy deposition by the projectiles. We employ pulsed beams in the medium energy regime and a large position-sensitive, time-of-flight detection system to ensure accurate quantification. As a target, we employ a single crystalline Si(100) self-supporting 50 nm thick membrane thus featuring two identical surfaces enabling simultaneous measurements in backscattering and transmission geometry. Electronic sputtering is identified as the governing mechanism for the desorption of hydrogen and molecular species found on the surfaces. Nevertheless, larger energy deposition to the nuclear subsystem by heavier projectiles as well as due to the directionality of the collision cascade appears to act in synergy with the electronic energy deposition leading to an overall increase in secondary ion yields. A higher yield of ions sputtered from the matrix is observed in transmission geometry only for B and Ne ions, consistent with the observed role of nuclear stopping.
format Preprint
id arxiv_https___arxiv_org_abs_2411_05525
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle The influence of geometry and specific electronic and nuclear energy deposition on ion-stimulated desorption from thin self-supporting membranes
Holeňák, Radek
Malatinová, Michaela
Ntemou, Eleni
Tran, Tuan T.
Primetzhofer, Daniel
Chemical Physics
Applied Physics
We investigate the dependence of the yield of positive secondary ions created upon impact of primary He, B and Ne ions on geometry and electronic and nuclear energy deposition by the projectiles. We employ pulsed beams in the medium energy regime and a large position-sensitive, time-of-flight detection system to ensure accurate quantification. As a target, we employ a single crystalline Si(100) self-supporting 50 nm thick membrane thus featuring two identical surfaces enabling simultaneous measurements in backscattering and transmission geometry. Electronic sputtering is identified as the governing mechanism for the desorption of hydrogen and molecular species found on the surfaces. Nevertheless, larger energy deposition to the nuclear subsystem by heavier projectiles as well as due to the directionality of the collision cascade appears to act in synergy with the electronic energy deposition leading to an overall increase in secondary ion yields. A higher yield of ions sputtered from the matrix is observed in transmission geometry only for B and Ne ions, consistent with the observed role of nuclear stopping.
title The influence of geometry and specific electronic and nuclear energy deposition on ion-stimulated desorption from thin self-supporting membranes
topic Chemical Physics
Applied Physics
url https://arxiv.org/abs/2411.05525