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GPU-Accelerated Inverse Lithography Towards High Quality Curvy Mask Generation

Fuente: arXiv

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Bibliographic Details
Main Authors:	Yang, Haoyu, Ren, Haoxing
Format:	Preprint
Published:	2024
Subjects:	Computer Vision and Pattern Recognition Optics B.7.2
Online Access:	Acceder al recurso
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