Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach

Fuente: arXiv

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Bibliographic Details
Main Authors:	Wang, Bingran, Kim, Min Sung, Yoon, Taewoong, Lee, Dasom, Kim, Byeong-Sang, Sung, Dougyong, Hwang, John T.
Format:	Preprint
Published:	2024
Subjects:	Computational Engineering, Finance, and Science
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2411.08149