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Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach

Fuente: arXiv

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Détails bibliographiques
Auteurs principaux:	Wang, Bingran, Kim, Min Sung, Yoon, Taewoong, Lee, Dasom, Kim, Byeong-Sang, Sung, Dougyong, Hwang, John T.
Format:	Preprint
Publié:	2024
Sujets:	Computational Engineering, Finance, and Science
Accès en ligne:	Acceder al recurso
Tags:	Ajouter un tag Pas de tags, Soyez le premier à ajouter un tag!

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