Ferroelectric HfO$_2$-ZrO$_2$ multilayers with reduced wake-up

Fuente: arXiv
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Main Authors: Mandal, Barnik, Philippe, Adrian-Marie, Valle, Nathalie, Defay, Emmanuel, Granzow, Torsten, Glinsek, Sebastjan
Format: Preprint
Published: 2024
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_version_ 1866917970645614592
author Mandal, Barnik
Philippe, Adrian-Marie
Valle, Nathalie
Defay, Emmanuel
Granzow, Torsten
Glinsek, Sebastjan
author_facet Mandal, Barnik
Philippe, Adrian-Marie
Valle, Nathalie
Defay, Emmanuel
Granzow, Torsten
Glinsek, Sebastjan
contents Since the discovery of ferroelectricity in HfO$_2$ thin films, significant research has focused on Zr-doped HfO$_2$ and solid solution (Hf,Zr)O$_2$ thin films. Functional properties can be further tuned via multilayering, however, this approach has not yet been fully explored in HfO$_2$-ZrO$_2$ films. This work demonstrates ferroelectricity in a 50 nm thick, solution-processed HfO$_2$-ZrO$_2$ multilayer film, marking it as the thickest multilayer film to date exhibiting ferroelectric properties. The multilayer structure was confirmed through transmission electron microscopy (TEM) and energy dispersive x-ray spectroscopy, with high-resolution TEM revealing grain continuity across multiple layers. This finding indicates that a polar phase in the originally paraelectric ZrO$_2$ layer, can be stabilized by the HfO$_2$ layer. The film attains a remanent polarization of 9 uC/cm$^2$ and exhibits accelerated wake-up behavior, attributed to its higher breakdown strength resulting from the incorporation of multiple interfaces. These results offer a faster wake-up mechanism for thick ferroelectric hafnia films.
format Preprint
id arxiv_https___arxiv_org_abs_2411_08683
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Ferroelectric HfO$_2$-ZrO$_2$ multilayers with reduced wake-up
Mandal, Barnik
Philippe, Adrian-Marie
Valle, Nathalie
Defay, Emmanuel
Granzow, Torsten
Glinsek, Sebastjan
Materials Science
Applied Physics
Since the discovery of ferroelectricity in HfO$_2$ thin films, significant research has focused on Zr-doped HfO$_2$ and solid solution (Hf,Zr)O$_2$ thin films. Functional properties can be further tuned via multilayering, however, this approach has not yet been fully explored in HfO$_2$-ZrO$_2$ films. This work demonstrates ferroelectricity in a 50 nm thick, solution-processed HfO$_2$-ZrO$_2$ multilayer film, marking it as the thickest multilayer film to date exhibiting ferroelectric properties. The multilayer structure was confirmed through transmission electron microscopy (TEM) and energy dispersive x-ray spectroscopy, with high-resolution TEM revealing grain continuity across multiple layers. This finding indicates that a polar phase in the originally paraelectric ZrO$_2$ layer, can be stabilized by the HfO$_2$ layer. The film attains a remanent polarization of 9 uC/cm$^2$ and exhibits accelerated wake-up behavior, attributed to its higher breakdown strength resulting from the incorporation of multiple interfaces. These results offer a faster wake-up mechanism for thick ferroelectric hafnia films.
title Ferroelectric HfO$_2$-ZrO$_2$ multilayers with reduced wake-up
topic Materials Science
Applied Physics
url https://arxiv.org/abs/2411.08683