ScAlN-on-SiC Ku-Band Solidly-Mounted Bidimensional Mode Resonators
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arXiv
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| Format: | Preprint |
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2024
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| author | Colombo, Luca Spagnuolo, Luca Saha, Kapil Giribaldi, Gabriel Simeoni, Pietro Rinaldi, Matteo |
| author_facet | Colombo, Luca Spagnuolo, Luca Saha, Kapil Giribaldi, Gabriel Simeoni, Pietro Rinaldi, Matteo |
| contents | This letter reports on Solidly-Mounted Bidimensional Mode Resonators (S2MRs) exploiting a highly-optimized Sezawa mode in 30% Scandium-doped Aluminum Nitride (ScAlN) on Silicon Carbide (SiC) and operating near 16 GHz. Experimental results demonstrate mechanical quality factors (Qm) as high as 380, Bode quality factors (QBode) approaching 500, electromechanical coupling coefficients (kt2) of 4.5%, an overall Figure of Merit (FOM = Qm kt2) exceeding 17, and power handling greater than 20 dBm for devices closely matched to 50 ohms. To the best of the authors' knowledge, S2MRs exhibit the highest Key Performance Indicators (KPIs) among solidly mounted resonators in the Ku band, paving the way for the integration of nanoacoustic devices on fast substrates with high-power electronics, tailored for military and harsh-environment applications. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2411_13751 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | ScAlN-on-SiC Ku-Band Solidly-Mounted Bidimensional Mode Resonators Colombo, Luca Spagnuolo, Luca Saha, Kapil Giribaldi, Gabriel Simeoni, Pietro Rinaldi, Matteo Systems and Control This letter reports on Solidly-Mounted Bidimensional Mode Resonators (S2MRs) exploiting a highly-optimized Sezawa mode in 30% Scandium-doped Aluminum Nitride (ScAlN) on Silicon Carbide (SiC) and operating near 16 GHz. Experimental results demonstrate mechanical quality factors (Qm) as high as 380, Bode quality factors (QBode) approaching 500, electromechanical coupling coefficients (kt2) of 4.5%, an overall Figure of Merit (FOM = Qm kt2) exceeding 17, and power handling greater than 20 dBm for devices closely matched to 50 ohms. To the best of the authors' knowledge, S2MRs exhibit the highest Key Performance Indicators (KPIs) among solidly mounted resonators in the Ku band, paving the way for the integration of nanoacoustic devices on fast substrates with high-power electronics, tailored for military and harsh-environment applications. |
| title | ScAlN-on-SiC Ku-Band Solidly-Mounted Bidimensional Mode Resonators |
| topic | Systems and Control |
| url | https://arxiv.org/abs/2411.13751 |