Crack-free Sc$_{x}$Al$_{1-x}$N(000$\bar{1}$) layers grown on Si(111) by plasma-assisted molecular beam epitaxy

Fuente: arXiv

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Bibliographic Details
Main Authors:	Dinh, Duc V., Chen, Zhuohui, Brandt, Oliver
Format:	Preprint
Published:	2024
Subjects:	Materials Science Applied Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2411.14872