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Crack-free Sc$_{x}$Al$_{1-x}$N(000$\bar{1}$) layers grown on Si(111) by plasma-assisted molecular beam epitaxy

Fuente: arXiv

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Dettagli Bibliografici
Autori principali:	Dinh, Duc V., Chen, Zhuohui, Brandt, Oliver
Natura:	Preprint
Pubblicazione:	2024
Soggetti:	Materials Science Applied Physics
Accesso online:	Acceder al recurso
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