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Improved Leakage Currents and Polarity Control through Oxygen Incorporation in Ferroelectric Al0.73Sc0.27N Thin Films

Fuente: arXiv

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Bibliographic Details
Main Authors:	Islam, Md Redwanul, Wolff, Niklas, Schönweger, Georg, Kreutzer, Tom-Niklas, Brown, Margaret, Gremmel, Maike, Straňák, Patrik, Kirste, Lutz, Brennecka, Geoff L., Fichtner, Simon, Kienle, Lorenz
Format:	Preprint
Published:	2024
Subjects:	Applied Physics Materials Science
Online Access:	Acceder al recurso
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