A Method for Fabricating CMOS Back-End-of-Line-Compatible Solid-State Nanopore Devices

Fuente: arXiv

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Bibliographic Details
Main Authors:	Bouhamidi, Mohamed Yassine, Dai, Chunhui, Stephan, Michel, Nag, Joyeeta, Kinney, Justin, Wan, Lei, Waugh, Matthew, Briggs, Kyle, Katine, Jordan, Tabard-Cossa, Vincent, Bedau, Daniel
Format:	Preprint
Published:	2024
Subjects:	Applied Physics Materials Science Biological Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2411.17416