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Multi-focal Picosecond laser vertical slicing of 6 inch 4H-SiC ingot

Fuente: arXiv

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Detalles Bibliográficos
Autores principales:	Du, Jiabao, Zhao, Shusen, Lu, Xiaoyu, Jiang, Lu, Han, Shifei, Li, Xinyao, Lin, Xuechun
Formato:	Preprint
Publicado:	2024
Materias:	Optics Applied Physics
Acceso en línea:	Acceder al recurso
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

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