Commercial CMOS Process for Quantum Computing: Quantum Dots and Charge Sensing in a 22 nm Fully Depleted Silicon-on-Insulator Process
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arXiv
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| Main Authors: | Amitonov, S. V., Aprà, A., Asker, M., Barry, B., Bashir, I., Bisiaux, P., Blokhina, E., Giounanlis, P., Hanos-Puskai, P., Harkin, M., Kriekouki, I., Leipold, D., Moras, M., Power, C., Samkharadze, N., Sokolov, A., Redmond, D., Rohrbacher, C., Wu, X. |
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| Format: | Preprint |
| Published: |
2024
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