Hybrid Model-Data Fault Diagnosis for Wafer Handler Robots: Tilt and Broken Belt Cases

Fuente: arXiv

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Bibliographic Details
Main Authors:	van Esch, Tim, Ghanipoor, Farhad, Murguia, Carlos, van de Wouw, Nathan
Format:	Preprint
Published:	2024
Subjects:	Robotics Systems and Control
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2412.09114