HfO$_2$-based platform for high-index-contrast visible/UV integrated photonics
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arXiv
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| Autori principali: | , , , , , |
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| Natura: | Preprint |
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2024
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| _version_ | 1866910926956920832 |
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| author | Jaramillo, Oscar Natarajan, Vighnesh Rivy, Hamim Mahmud Tensuan, Joshua Massai, Leonardo Mehta, Karan K. |
| author_facet | Jaramillo, Oscar Natarajan, Vighnesh Rivy, Hamim Mahmud Tensuan, Joshua Massai, Leonardo Mehta, Karan K. |
| contents | Ultraviolet and visible integrated photonics are enabling for applications in quantum information, sensing, and spectroscopy, among others. Few materials support low-loss photonics into the UV, and the relatively low refractive index of known depositable materials limits the achievable functionality. Here we present a high-index integrated photonics platform based on HfO$_2$ and Al$_2$O$_3$ composites deposited via Atomic Layer Deposition (ALD) with low loss in the visible and near-UV. We show that Al$_2$O$_3$ incorporation dramatically decreases bulk loss compared to pure HfO$_2$, consistent with inhibited crystallization due to the admixture of Al$_2$O$_3$. Composites exhibit refractive index $n$ following the average of that of HfO$_2$ and Al$_2$O$_3$, weighted by the HfO$_2$ fractional composition $x$. At $λ=375$ nm, composites with $x=0.67$ exhibit $n=2.08$ preserving most of HfO$_2$'s significantly higher index, and $3.8(7) $ dB/cm material loss. We further present fully etched and cladded waveguides, grating couplers, and ring resonators, realizing single-mode waveguide loss of $0.25(2)$ dB/cm inferred from resonators of 2.6 million intrinsic quality factor at $λ=729$ nm, $2.6(2)$ dB/cm at $λ=405$ nm, and $7.7(6)$ dB/cm at $λ=375$ nm. We measure the composite's thermo-optic coefficient (TOC) to be $2.44(3) \times 10^{-5}$ RIU/$^\circ$C near $λ=397$ nm. This work establishes (HfO$_2$)$_x$(Al$_2$O$_3$)$_{1-x}$ composites as a platform amenable to integration for low-loss, high-index photonics spanning the UV to NIR. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2412_09421 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | HfO$_2$-based platform for high-index-contrast visible/UV integrated photonics Jaramillo, Oscar Natarajan, Vighnesh Rivy, Hamim Mahmud Tensuan, Joshua Massai, Leonardo Mehta, Karan K. Optics Ultraviolet and visible integrated photonics are enabling for applications in quantum information, sensing, and spectroscopy, among others. Few materials support low-loss photonics into the UV, and the relatively low refractive index of known depositable materials limits the achievable functionality. Here we present a high-index integrated photonics platform based on HfO$_2$ and Al$_2$O$_3$ composites deposited via Atomic Layer Deposition (ALD) with low loss in the visible and near-UV. We show that Al$_2$O$_3$ incorporation dramatically decreases bulk loss compared to pure HfO$_2$, consistent with inhibited crystallization due to the admixture of Al$_2$O$_3$. Composites exhibit refractive index $n$ following the average of that of HfO$_2$ and Al$_2$O$_3$, weighted by the HfO$_2$ fractional composition $x$. At $λ=375$ nm, composites with $x=0.67$ exhibit $n=2.08$ preserving most of HfO$_2$'s significantly higher index, and $3.8(7) $ dB/cm material loss. We further present fully etched and cladded waveguides, grating couplers, and ring resonators, realizing single-mode waveguide loss of $0.25(2)$ dB/cm inferred from resonators of 2.6 million intrinsic quality factor at $λ=729$ nm, $2.6(2)$ dB/cm at $λ=405$ nm, and $7.7(6)$ dB/cm at $λ=375$ nm. We measure the composite's thermo-optic coefficient (TOC) to be $2.44(3) \times 10^{-5}$ RIU/$^\circ$C near $λ=397$ nm. This work establishes (HfO$_2$)$_x$(Al$_2$O$_3$)$_{1-x}$ composites as a platform amenable to integration for low-loss, high-index photonics spanning the UV to NIR. |
| title | HfO$_2$-based platform for high-index-contrast visible/UV integrated photonics |
| topic | Optics |
| url | https://arxiv.org/abs/2412.09421 |