Benchmarking large language models for materials synthesis: the case of atomic layer deposition
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arXiv
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| Main Authors: | Yanguas-Gil, Angel, Dearing, Matthew T., Elam, Jeffrey W., Jones, Jessica C., Kim, Sungjoon, Mohammad, Adnan, Nguyen, Chi Thang, Sengupta, Bratin |
|---|---|
| Format: | Preprint |
| Published: |
2024
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| Subjects: | |
| Online Access: | |
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