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Towards Improved Polarization Uniformity in Ferroelectric Hf$_{0.5}$Zr$_{0.5}$O$_2$ Devices within Back End of Line Thermal Budget for Memory and Neuromorphic Applications

Fuente: arXiv

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Bibliographic Details
Main Authors:	Srivari, Padma, Paasio, Ella, Li, Xinye, Majumdar, Sayani
Format:	Preprint
Published:	2024
Subjects:	Applied Physics Materials Science
Online Access:	Acceder al recurso
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