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Fast inverse lithography based on a model-driven block stacking convolutional neural network

Fuente: arXiv

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Bibliographic Details
Main Authors:	Chen, Ruixiang, Zhao, Yang, Li, Haoqin, Chen, Rui
Format:	Preprint
Published:	2024
Subjects:	Optics Machine Learning
Online Access:	Acceder al recurso
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