Active nitrogen flux measurement during GaN growth based on the transmitted signal detected with a pyrometer
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arXiv
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| Main Authors: | , , , , |
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| Format: | Preprint |
| Published: |
2024
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| _version_ | 1866916535676698624 |
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| author | Canciani, Matteo Vichi, Stefano Koplak, Oksana Bietti, Sergio Sanguinetti, Stefano |
| author_facet | Canciani, Matteo Vichi, Stefano Koplak, Oksana Bietti, Sergio Sanguinetti, Stefano |
| contents | A novel approach for the measurement of the Nitrogen active species generated by a plasma source in the molecular beam epitaxy environment is here presented. The method is based on the analysis of the variations in the optical signal measured by a pyrometer during a two step, Gallium rich and Nitrogen controlled, growth modes. The method permits a precise, quantitative and direct measurement of the flux of active species as a function of the plasma generation parameters of the cell: nitrogen gas flux and RF-power. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2412_15710 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | Active nitrogen flux measurement during GaN growth based on the transmitted signal detected with a pyrometer Canciani, Matteo Vichi, Stefano Koplak, Oksana Bietti, Sergio Sanguinetti, Stefano Instrumentation and Detectors Materials Science A novel approach for the measurement of the Nitrogen active species generated by a plasma source in the molecular beam epitaxy environment is here presented. The method is based on the analysis of the variations in the optical signal measured by a pyrometer during a two step, Gallium rich and Nitrogen controlled, growth modes. The method permits a precise, quantitative and direct measurement of the flux of active species as a function of the plasma generation parameters of the cell: nitrogen gas flux and RF-power. |
| title | Active nitrogen flux measurement during GaN growth based on the transmitted signal detected with a pyrometer |
| topic | Instrumentation and Detectors Materials Science |
| url | https://arxiv.org/abs/2412.15710 |