A detailed examination of polysilicon resistivity incorporating the grain size distribution
Fuente:
arXiv
Guardado en:
| Autores principales: | Santonen, Mikael, Lahti, Antti, Rad, Zahra Jahanshah, Miettinen, Mikko, Ebrahimzadeh, Masoud, Lehtiö, Juha-Pekka, Snellman, Enni, Laukkanen, Pekka, Punkkinen, Marko, Kokko, Kalevi, Parkkinen, Katja, Eklund, Markus |
|---|---|
| Formato: | Preprint |
| Publicado: |
2024
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| Materias: | |
| Acceso en línea: | |
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