Electromagnetic particle-in-cell modeling of an electron cyclotron resonance plasma discharge in hydrogen

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Hauptverfasser: Eremin, D., Sharova, Yu., Heijmans, L., Yakunin, A. M., van de Kerkhof, M., Brinkmann, R. -P., Kemaneci, E.
Format: Preprint
Veröffentlicht: 2024
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author Eremin, D.
Sharova, Yu.
Heijmans, L.
Yakunin, A. M.
van de Kerkhof, M.
Brinkmann, R. -P.
Kemaneci, E.
author_facet Eremin, D.
Sharova, Yu.
Heijmans, L.
Yakunin, A. M.
van de Kerkhof, M.
Brinkmann, R. -P.
Kemaneci, E.
contents A low pressure discharge sustained in molecular hydrogen with help of the electron cyclotron resonance heating at a frequency of 2.45 GHz is simulated using a fully electromagnetic implicit charge- and energy-conserving particle-in-cell/Monte Carlo code. The simulations show a number of kinetic effects, and the results are in good agreement with various experimentally measured data such as electron density, electron temperature and degree of dissociation. The electron energy distribution shows a tri-Maxwellian form due to a number of different electron heating mechanisms, agreeing with the experimental data in the measured electron energy interval. The simulation results are also verified against a drift-diffusion model and proximity is observed between the computational results for the plasma density at the location of experimental measurement. However, the fluid approximation fails to accurately predict radical density and electron temperature because of the assumption of a single electron temperature. Special attention is paid to the characteristics of hydrogen radicals, whose production is strongly underestimated by the fluid model, whereas it is well predicted by the model considered here. The energy distribution of such radicals demonstrates the presence of a relatively large number of energetic hydrogen atoms produced by the dissociation of molecular hydrogen. The new insights are of significance for practical applications of hydrogen plasmas.
format Preprint
id arxiv_https___arxiv_org_abs_2412_15802
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Electromagnetic particle-in-cell modeling of an electron cyclotron resonance plasma discharge in hydrogen
Eremin, D.
Sharova, Yu.
Heijmans, L.
Yakunin, A. M.
van de Kerkhof, M.
Brinkmann, R. -P.
Kemaneci, E.
Plasma Physics
A low pressure discharge sustained in molecular hydrogen with help of the electron cyclotron resonance heating at a frequency of 2.45 GHz is simulated using a fully electromagnetic implicit charge- and energy-conserving particle-in-cell/Monte Carlo code. The simulations show a number of kinetic effects, and the results are in good agreement with various experimentally measured data such as electron density, electron temperature and degree of dissociation. The electron energy distribution shows a tri-Maxwellian form due to a number of different electron heating mechanisms, agreeing with the experimental data in the measured electron energy interval. The simulation results are also verified against a drift-diffusion model and proximity is observed between the computational results for the plasma density at the location of experimental measurement. However, the fluid approximation fails to accurately predict radical density and electron temperature because of the assumption of a single electron temperature. Special attention is paid to the characteristics of hydrogen radicals, whose production is strongly underestimated by the fluid model, whereas it is well predicted by the model considered here. The energy distribution of such radicals demonstrates the presence of a relatively large number of energetic hydrogen atoms produced by the dissociation of molecular hydrogen. The new insights are of significance for practical applications of hydrogen plasmas.
title Electromagnetic particle-in-cell modeling of an electron cyclotron resonance plasma discharge in hydrogen
topic Plasma Physics
url https://arxiv.org/abs/2412.15802