Extraordinary oxidation behavior of W-Zr thin-film metallic glasses: A route for tailoring functional properties of W-Zr-O films

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Hauptverfasser: Zeman, Petr, Červená, Michaela, Houška, Jiří, Haviar, Stanislav, Rezek, Jiří, Zuzjaková, Šárka
Format: Preprint
Veröffentlicht: 2024
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author Zeman, Petr
Červená, Michaela
Houška, Jiří
Haviar, Stanislav
Rezek, Jiří
Zuzjaková, Šárka
author_facet Zeman, Petr
Červená, Michaela
Houška, Jiří
Haviar, Stanislav
Rezek, Jiří
Zuzjaková, Šárka
contents The oxidation behavior of W-Zr thin-film metallic glasses (TFMGs) with 32, 48 and 61 at.% Zr, prepared by dc magnetron co-sputtering, was comprehensively studied after annealing in synthetic air. The study focuses on the effect of the annealing temperature (up to 600°C) on the oxidation process, oxygen saturation, structure evolution, and their subsequent impact on electrical, optical and mechanical properties. The findings reveal that controlled oxidation transforms W-Zr TFMGs into amorphous ceramic W-Zr-O films with substoichiometric compositions. This is a consequence of an oxidation process that does not proceed through the formation of a stoichiometric oxide layer on the surface of W-Zr TFMGs, acting as a diffusion barrier against fast oxidation, but leads to a gradual incorporation of oxygen across the film volume due to thermodynamics factors. Higher Zr content accelerates the oxygen incorporation and its depth uniformity in the films. As a result, the mechanical properties are significantly enhanced achieving hardness values of up to 17.5 GPa at approximately 50% oxygen saturation. Simultaneously, the electrical and optical properties are finely tuned with the resistivity and the extinction coefficient (measured at 550 nm) ranging from 1.7 to 95.7x10-4 Ohm.cm and 0.28 to 1.06, respectively.
format Preprint
id arxiv_https___arxiv_org_abs_2412_15943
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Extraordinary oxidation behavior of W-Zr thin-film metallic glasses: A route for tailoring functional properties of W-Zr-O films
Zeman, Petr
Červená, Michaela
Houška, Jiří
Haviar, Stanislav
Rezek, Jiří
Zuzjaková, Šárka
Materials Science
The oxidation behavior of W-Zr thin-film metallic glasses (TFMGs) with 32, 48 and 61 at.% Zr, prepared by dc magnetron co-sputtering, was comprehensively studied after annealing in synthetic air. The study focuses on the effect of the annealing temperature (up to 600°C) on the oxidation process, oxygen saturation, structure evolution, and their subsequent impact on electrical, optical and mechanical properties. The findings reveal that controlled oxidation transforms W-Zr TFMGs into amorphous ceramic W-Zr-O films with substoichiometric compositions. This is a consequence of an oxidation process that does not proceed through the formation of a stoichiometric oxide layer on the surface of W-Zr TFMGs, acting as a diffusion barrier against fast oxidation, but leads to a gradual incorporation of oxygen across the film volume due to thermodynamics factors. Higher Zr content accelerates the oxygen incorporation and its depth uniformity in the films. As a result, the mechanical properties are significantly enhanced achieving hardness values of up to 17.5 GPa at approximately 50% oxygen saturation. Simultaneously, the electrical and optical properties are finely tuned with the resistivity and the extinction coefficient (measured at 550 nm) ranging from 1.7 to 95.7x10-4 Ohm.cm and 0.28 to 1.06, respectively.
title Extraordinary oxidation behavior of W-Zr thin-film metallic glasses: A route for tailoring functional properties of W-Zr-O films
topic Materials Science
url https://arxiv.org/abs/2412.15943