Ferroelectric AlScN thin films with enhanced polarization and low leakage enabled by high-power impulse magnetron sputtering

Fuente: arXiv

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Bibliographic Details
Main Authors:	Messi, Federica, Patidar, Jyotish, Rodkey, Nathan, Dräyer, Christoph W., Trassin, Morgan, Siol, Sebastian
Format:	Preprint
Published:	2025
Subjects:	Applied Physics Materials Science
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2501.02101