_version_ 1866916692528988160
author Schofield, Steven R.
Fisher, Andrew J.
Ginossar, Eran
Lyding, Joseph W.
Silver, Richard
Fei, Fan
Namboodiri, Pradeep
Wyrick, Jonathan
Masteghin, M. G.
Cox, D. C.
Murdin, B. N.
Clowes, S. K
Keizer, Joris G.
Simmons, Michelle Y.
Stemp, Holly G.
Morello, Andrea
Voisin, Benoit
Rogge, Sven
Wolkow, Robert A.
Livadaru, Lucian
Pitters, Jason
Stock, Taylor J. Z.
Curson, Neil J.
Butera, Robert E.
Pavlova, Tatiana V.
Jakob, A. M.
Spemann, D.
Räcke, P.
Schmidt-Kaler, F.
Jamieson, D. N.
Pratiush, Utkarsh
Duscher, Gerd
Kalinin, Sergei V.
Kazazis, Dimitrios
Constantinou, Procopios
Aeppli, Gabriel
Ekinci, Yasin
Owen, James H. G.
Fowler, Emma
Moheimani, S. O. Reza
Randall, John N.
Misra, Shashank
Ivie, Jeffrey
Allemang, Christopher R.
Anderson, Evan M.
Bussmann, Ezra
Campbell, Quinn
Gao, Xujiao
Lu, Tzu-Ming
Schmucker, Scott W.
author_facet Schofield, Steven R.
Fisher, Andrew J.
Ginossar, Eran
Lyding, Joseph W.
Silver, Richard
Fei, Fan
Namboodiri, Pradeep
Wyrick, Jonathan
Masteghin, M. G.
Cox, D. C.
Murdin, B. N.
Clowes, S. K
Keizer, Joris G.
Simmons, Michelle Y.
Stemp, Holly G.
Morello, Andrea
Voisin, Benoit
Rogge, Sven
Wolkow, Robert A.
Livadaru, Lucian
Pitters, Jason
Stock, Taylor J. Z.
Curson, Neil J.
Butera, Robert E.
Pavlova, Tatiana V.
Jakob, A. M.
Spemann, D.
Räcke, P.
Schmidt-Kaler, F.
Jamieson, D. N.
Pratiush, Utkarsh
Duscher, Gerd
Kalinin, Sergei V.
Kazazis, Dimitrios
Constantinou, Procopios
Aeppli, Gabriel
Ekinci, Yasin
Owen, James H. G.
Fowler, Emma
Moheimani, S. O. Reza
Randall, John N.
Misra, Shashank
Ivie, Jeffrey
Allemang, Christopher R.
Anderson, Evan M.
Bussmann, Ezra
Campbell, Quinn
Gao, Xujiao
Lu, Tzu-Ming
Schmucker, Scott W.
contents Spin states in semiconductors provide exceptionally stable and noise-resistant environments for qubits, positioning them as optimal candidates for reliable quantum computing technologies. The proposal to use nuclear and electronic spins of donor atoms in silicon, introduced by Kane in 1998, sparked a new research field focused on the precise positioning of individual impurity atoms for quantum devices, utilising scanning tunnelling microscopy and ion implantation. This roadmap article reviews the advancements in the 25 years since Kane's proposal, the current challenges, and the future directions in atomic-scale semiconductor device fabrication and measurement. It covers the quest to create a silicon-based quantum computer and expands to include diverse material systems and fabrication techniques, highlighting the potential for a broad range of semiconductor quantum technological applications. Key developments include phosphorus in silicon devices such as single-atom transistors, arrayed few-donor devices, one- and two-qubit gates, three-dimensional architectures, and the development of a toolbox for future quantum integrated circuits. The roadmap also explores new impurity species like arsenic and antimony for enhanced scalability and higher-dimensional spin systems, new chemistry for dopant precursors and lithographic resists, and the potential for germanium-based devices. Emerging methods, such as photon-based lithography and electron beam manipulation, are discussed for their disruptive potential. This roadmap charts the path toward scalable quantum computing and advanced semiconductor quantum technologies, emphasising the critical intersections of experiment, technological development, and theory.
format Preprint
id arxiv_https___arxiv_org_abs_2501_04535
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Roadmap on Atomic-scale Semiconductor Devices
Schofield, Steven R.
Fisher, Andrew J.
Ginossar, Eran
Lyding, Joseph W.
Silver, Richard
Fei, Fan
Namboodiri, Pradeep
Wyrick, Jonathan
Masteghin, M. G.
Cox, D. C.
Murdin, B. N.
Clowes, S. K
Keizer, Joris G.
Simmons, Michelle Y.
Stemp, Holly G.
Morello, Andrea
Voisin, Benoit
Rogge, Sven
Wolkow, Robert A.
Livadaru, Lucian
Pitters, Jason
Stock, Taylor J. Z.
Curson, Neil J.
Butera, Robert E.
Pavlova, Tatiana V.
Jakob, A. M.
Spemann, D.
Räcke, P.
Schmidt-Kaler, F.
Jamieson, D. N.
Pratiush, Utkarsh
Duscher, Gerd
Kalinin, Sergei V.
Kazazis, Dimitrios
Constantinou, Procopios
Aeppli, Gabriel
Ekinci, Yasin
Owen, James H. G.
Fowler, Emma
Moheimani, S. O. Reza
Randall, John N.
Misra, Shashank
Ivie, Jeffrey
Allemang, Christopher R.
Anderson, Evan M.
Bussmann, Ezra
Campbell, Quinn
Gao, Xujiao
Lu, Tzu-Ming
Schmucker, Scott W.
Quantum Physics
Applied Physics
Spin states in semiconductors provide exceptionally stable and noise-resistant environments for qubits, positioning them as optimal candidates for reliable quantum computing technologies. The proposal to use nuclear and electronic spins of donor atoms in silicon, introduced by Kane in 1998, sparked a new research field focused on the precise positioning of individual impurity atoms for quantum devices, utilising scanning tunnelling microscopy and ion implantation. This roadmap article reviews the advancements in the 25 years since Kane's proposal, the current challenges, and the future directions in atomic-scale semiconductor device fabrication and measurement. It covers the quest to create a silicon-based quantum computer and expands to include diverse material systems and fabrication techniques, highlighting the potential for a broad range of semiconductor quantum technological applications. Key developments include phosphorus in silicon devices such as single-atom transistors, arrayed few-donor devices, one- and two-qubit gates, three-dimensional architectures, and the development of a toolbox for future quantum integrated circuits. The roadmap also explores new impurity species like arsenic and antimony for enhanced scalability and higher-dimensional spin systems, new chemistry for dopant precursors and lithographic resists, and the potential for germanium-based devices. Emerging methods, such as photon-based lithography and electron beam manipulation, are discussed for their disruptive potential. This roadmap charts the path toward scalable quantum computing and advanced semiconductor quantum technologies, emphasising the critical intersections of experiment, technological development, and theory.
title Roadmap on Atomic-scale Semiconductor Devices
topic Quantum Physics
Applied Physics
url https://arxiv.org/abs/2501.04535