Multi-Length-Scale Dopants Analysis of an Image Sensor via Focused Ion Beam-Secondary Ion Mass Spectrometry and Atom Probe Tomography

Fuente: arXiv

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Bibliographic Details
Main Authors:	Guerguis, Bavley, Cuduvally, Ramya, Ost, Alexander, Ghorbani, Morvarid, Rashid, Sabaa, Machado, Wilson, McGrath, Dan, Pawlowicz, Chris, Langelier, Brian, Bassim, Nabil
Format:	Preprint
Published:	2025
Subjects:	Applied Physics Materials Science
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2501.08980